Cryogenic Probe Station

The configuration of the high and low temperature magnetic field probe station is mainly selected and designed according to the needs of users. For example, the required magnetic field value, the size of the uniform area, the size of the uniformity, the size of the sample stage, etc.

1. These parameters are related to the magnetic flux density generated by the magnetic field lines in a certain area;
2. The displacement stage can also be matched with the magnetic fluid seal to realize two-dimensional movement in the horizontal direction and 360-degree rotation of the sample stage;
3. In addition, the combination of the probe station and the high-precision bipolar constant current power supply independently developed by our company enables users to achieve high stability of the magnetic field.

The probe station is equipped with 4 (6, 8) probe arms with high-precision displacement, and is equipped with a high-precision electron microscope, which is convenient for the observation operation of tiny samples. The probe can be used to test chips, wafers, packaged devices, etc. through DC or low-frequency AC signals. It is widely used in the semiconductor industry, MEMS, superconductivity, electronics, ferroelectronics, physics, materials science, and biomedicine. 

Applications:

Magnetic property test, microwave property test, DC, RF property test, MEMS, superconductivity test, optoelectronic property of nano-circuit, quantum dot and wire, chip test under high and low temperature vacuum environment, material test, Hall test , electromagnetic transport properties, etc.

Optional accessories:

1. Various DC probes, high frequency probes, active probes, cable CCD or C-MOS video imaging devices;
2. Chuck motion device electromagnet system/superconducting magnet system;
3. 1Mpa positive pressure system upgrade;
4. Ultra High Temperature Upgrade Options;
5. Ultra High Vacuum Upgrade Options;
6. Various Probe Fixtures;
7. Shielding box anti-vibration table;
8. Adapter;
9. Silent Vacuum Pump.

Parameters

Parameter confirmation before purchase:

1. The maximum number of inches of wafers or devices that need to be tested; whether it is necessary to test fragments or single chips; the smallest single chip size;
2. How high is the mechanical precision requirement of the probe station;
3. The electrode size of spot measurement sample; 100μm*100μm or 60μm*60μm pad, or the mini pad made by FIB, or the metal circuit inside the ic;
4. A maximum of several probes are required for point measurement at the same time;
5. Whether the probe card test will be used;
6. How much is the minimum resolution of the optical microscope required;
7. In terms of microscopy, is it necessary to add a polarizer for LC liquid crystal hotspot detection;
8. Whether the current requirement reaches 100fa or below during the probe spot test! Does the low capacitance requirement need to be 0.1pf; Whether there is a radio frequency requirement;
9. What are the connected test instrument interfaces;
10. Whether heating or cooling is required when testing the environment! Whether a closed cavity is required;
11. What about Chuck's leakage requirements; Do you need to add a low-impedance chuck;
12. Whether an anti-shock table is required;
13. If you add a shockproof table, whether there is compressed air.

More pictures of the Cryogenic Probe Station