Cryogenic Probe Station

The configuration of the high and low temperature magnetic field probe station is mainly selected and designed according to the needs of users. For example, the required magnetic field value, the size of the uniform area, the size of the uniformity, the size of the sample stage, etc.


  1. These parameters are related to the magnetic flux density generated by the magnetic field lines in a certain area;
  2. The displacement stage can also be matched with the magnetic fluid seal to realize two-dimensional movement in the horizontal direction and 360-degree rotation of the sample stage;
  3. In addition, the combination of the probe station and the high-precision bipolar constant current power supply independently developed by our company enables users to achieve high stability of the magnetic field.


The probe station is equipped with 4 (6, 8) probe arms with high-precision displacement, and is equipped with a high-precision electron microscope, which is convenient for the observation operation of tiny samples. The probe can be used to test chips, wafers, packaged devices, etc. through DC or low-frequency AC signals. It is widely used in the semiconductor industry, MEMS, superconductivity, electronics, ferroelectronics, physics, materials science, and biomedicine. 




Magnetic property test, microwave property test, DC, RF property test, MEMS, superconductivity test, optoelectronic property of nano-circuit, quantum dot and wire, chip test under high and low temperature vacuum environment, material test, Hall test , electromagnetic transport properties, etc.


Optional accessories:


  1. Various DC probes, high frequency probes, active probes, cable CCD or C-MOS video imaging devices;
  2. Chuck motion device electromagnet system/superconducting magnet system;
  3. 1Mpa positive pressure system upgrade;
  4. Ultra High Temperature Upgrade Options;
  5. Ultra High Vacuum Upgrade Options;
  6. Various Probe Fixtures;
  7. Shielding box anti-vibration table;
  8. Adapter;
  9. Silent Vacuum Pump.




High and low temperature vacuum magnetic field probe station
Vacuum degree Maximum vacuum 10-8Pa
Cavity Material Non-magnetic stainless steel or aluminum alloy
Magnetic Field Range 2000Gs @ 50mm 5000Gs @ 50mm 1T @ 50mm
Magnetic Field Direction horizontal (can be designed according to user requirements in the vertical direction)
Power supply Bipolar power supply ± 50A Bipolar Power Supply ± 70A Bipolar Power Supply ± 90A
Power supply stability 50ppm optional 10ppm
Refrigeration mode Liquid helium/liquid nitrogen refrigeration/closed cycle refrigerator
Temperature Range 5 K-325K optional 500K
Temperature Range 65 K-325K optional 600K
Temperature Control Resolution 0.001K temperature controller related
Temperature stability better than 0.1K depending on the temperature controller
Temperature sensor silicon diode/PT 100
Sensors One sample table, one radiation screen and one probe arm.
Sample table size (max) Φ50mm, flatness ≤ u7m
Sample table fixing method Vacuum Silicone Grease/Spring Presses
Sample table material gold-plated oxygen-free copper
Microscope Travel X, Y plane 2*2inch, accuracy 1um, Z axis travel ≥ 50.8mm
Magnification 16 ~ 100X/20 ~ 4000X
Vacuum chamber observation window size 1 inch 1.5 inch 2 inch
Window Materials fused silica (optional K9, calcium fluoride, etc.)
Number of probe arms 2, 4, 6, 8 optional
Probe Arm Travel 25 mm-25mm-12mm replaceable
Mechanical accuracy 10um/ 2um/ 1um/ 0.7um
Interface form Ordinary vacuum joint/three coaxial joint/BNC/ SMA, etc
Probe diameter 0.51mm
Needle tip diameter 10um/ 5um/ 1um optional
Probe material Tungsten/GGB
Supply voltage AC220V 50Hz/60Hz AC380V 50Hz/60Hz



Parameter confirmation before purchase:


  1. The maximum number of inches of wafers or devices that need to be tested; whether it is necessary to test fragments or single chips; the smallest single chip size;
  2. How high is the mechanical precision requirement of the probe station;
  3. The electrode size of spot measurement sample; 100μm*100μm or 60μm*60μm pad, or the mini pad made by FIB, or the metal circuit inside the ic;
  4. A maximum of several probes are required for point measurement at the same time;
  5. Whether the probe card test will be used;
  6. How much is the minimum resolution of the optical microscope required;
  7. In terms of microscopy, is it necessary to add a polarizer for LC liquid crystal hotspot detection;
  8. Whether the current requirement reaches 100fa or below during the probe spot test! Does the low capacitance requirement need to be 0.1pf; Whether there is a radio frequency requirement;
  9. What are the connected test instrument interfaces;
  10. Whether heating or cooling is required when testing the environment! Whether a closed cavity is required;
  11. What about Chuck's leakage requirements; Do you need to add a low-impedance chuck;
  12. Whether an anti-shock table is required;
  13. If you add a shockproof table, whether there is compressed air.


More pictures of the Cryogenic Probe Station


High and low temperature probe station 1 High and low temperature probe station 2 High and low temperature probe station 3


High and low temperature probe station 4

The Cryogenic Probe Station (optional: high temperature, low temperature, vacuum, magnetic field) is a high-precision experimental platform that is mainly used for testing the electrical and magnetic characteristics of semiconductor materials, micro-nano devices, magnetic materials, spintronic devices and related technical fields.
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