Three-dimensional Magnetic Field Probe Station

Dexinmag's one-dimensional, two-dimensional, three-dimensional magnetic field probe station.

1. The coil can be air-cooled (smaller magnetic field) or water-cooled (larger magnetic field), and is equipped with a coil overheat protection device.
2. It can work stably for a long time when used in conjunction with the high-precision bipolar DC power supply produced by Dexinmag.
3. The output current in each dimension is controlled by the software or the buttons on the power control panel, and a vector magnetic field in any direction in space can be generated.
4. The probe station is equipped with a movable sample stage, which can realize two-dimensional movement in the horizontal direction and 360-degree rotation of the sample stage, which is convenient for sample installation and testing.
5. The probe station has four high-precision probe arms, and is equipped with a high-precision electron microscope, which is convenient for the observation operation of tiny samples.
6. The probe can be used to test chips, wafers, packaged devices, etc. through DC or low-frequency AC signals.

Applications:

Widely used in the semiconductor industry, MEMS, superconductivity, electronics, ferroelectronics, physics, materials science and biomedicine and other fields. The three-dimensional probe station is matched with the high-precision bipolar power supply independently developed by Dexinmag. Through the real bipolar power output, the vector field synthesis in any direction in space is realized.

Optional accessories:

1. Various DC probes, high frequency probes, active probes, cable CCD or C-MOS video imaging devices;
2. Chuck motion device electromagnet system/superconducting magnet system;
3. 1Mpa positive pressure system upgrade;
4. Ultra High Temperature Upgrade Options;
5. Ultra High Vacuum Upgrade Options;
6. Various Probe Fixtures;
7. Shielding box anti-vibration table;
8. Adapter;
9. Silent Vacuum Pump.

Parameters

Parameter confirmation before purchase:

1. The maximum number of inches of wafers or devices that need to be tested; whether it is necessary to test fragments or single chips; the smallest single chip size;
2. How high is the mechanical precision requirement of the probe station;
3. The electrode size of spot measurement sample; 100μm*100μm or 60μm*60μm pad, or the mini pad made by FIB, or the metal circuit inside the ic;
4. A maximum of several probes are required for point measurement at the same time;
5. Whether the probe card test will be used;
6. How much is the minimum resolution of the optical microscope required;
7. In terms of microscopy, is it necessary to add a polarizer for LC liquid crystal hotspot detection;
8. Whether the current requirement reaches 100fa or below during the probe spot test! Does the low capacitance requirement need to be 0.1pf; Whether there is a radio frequency requirement;
9. What are the connected test instrument interfaces;
10. Whether heating or cooling is required when testing the environment! Whether a closed cavity is required;
11. What about Chuck's leakage requirements; Do you need to add a low-impedance chuck;
12. Whether an anti-shock table is required;
13. If you add a shockproof table, whether there is compressed air.