Three-dimensional Magnetic Field Probe Station

Dexinmag's one-dimensional, two-dimensional, three-dimensional magnetic field probe station.


  1. The coil can be air-cooled (smaller magnetic field) or water-cooled (larger magnetic field), and is equipped with a coil overheat protection device.
  2. It can work stably for a long time when used in conjunction with the high-precision bipolar DC power supply produced by Dexinmag.
  3. The output current in each dimension is controlled by the software or the buttons on the power control panel, and a vector magnetic field in any direction in space can be generated.
  4. The probe station is equipped with a movable sample stage, which can realize two-dimensional movement in the horizontal direction and 360-degree rotation of the sample stage, which is convenient for sample installation and testing.
  5. The probe station has four high-precision probe arms, and is equipped with a high-precision electron microscope, which is convenient for the observation operation of tiny samples.
  6. The probe can be used to test chips, wafers, packaged devices, etc. through DC or low-frequency AC signals.




Widely used in the semiconductor industry, MEMS, superconductivity, electronics, ferroelectronics, physics, materials science and biomedicine and other fields. The three-dimensional probe station is matched with the high-precision bipolar power supply independently developed by Dexinmag. Through the real bipolar power output, the vector field synthesis in any direction in space is realized.


Optional accessories:


  1. Various DC probes, high frequency probes, active probes, cable CCD or C-MOS video imaging devices;
  2. Chuck motion device electromagnet system/superconducting magnet system;
  3. 1Mpa positive pressure system upgrade;
  4. Ultra High Temperature Upgrade Options;
  5. Ultra High Vacuum Upgrade Options;
  6. Various Probe Fixtures;
  7. Shielding box anti-vibration table;
  8. Adapter;
  9. Silent Vacuum Pump.




Three-dimensional magnetic field probe station
Model DX3PS1 DX3PS2 DX3PS3
Material selected materials are high quality non-magnetic material
Magnetic Field Range 500Gs 300Gs 100GS
Coil Material high quality high temperature resistant enameled wire
Magnetic field uniformity center area 50mm sphere within 1%
Power stability three high precision DC power supply 50ppm optional 10ppm
Magnetic Field Resolution 0.05mT
Angular resolution 0.02 °
Sample fixing method suction cup or tablet
Sample table diameter 50mm can be customized
Microscope X and Y planes 2*2inch, accuracy 1μm,Z axis travel ≥ 50.8mm, optional loading laser
Magnification 16 ~ 100X/20 ~ 4000X
Number of probe arms 2, 4 optional
Probe arm travel 25 mm-25mm-12mm replaceable
Probe arm movement accuracy 10um/2um/1um/0.7μm optional
Probe length 38mm
Probe diameter 0.51mm
Needle diameter 10μm/5μm/1μm
Probe material Tungsten/Beryllium Copper/GGB
Leakage accuracy 100fA
Microscope X and Y planes 2*2inch, accuracy 1μm,Z axis travel ≥ 50.8mm, optional loading laser



Parameter confirmation before purchase:


  1. The maximum number of inches of wafers or devices that need to be tested; whether it is necessary to test fragments or single chips; the smallest single chip size;
  2. How high is the mechanical precision requirement of the probe station;
  3. The electrode size of spot measurement sample; 100μm*100μm or 60μm*60μm pad, or the mini pad made by FIB, or the metal circuit inside the ic;
  4. A maximum of several probes are required for point measurement at the same time;
  5. Whether the probe card test will be used;
  6. How much is the minimum resolution of the optical microscope required;
  7. In terms of microscopy, is it necessary to add a polarizer for LC liquid crystal hotspot detection;
  8. Whether the current requirement reaches 100fa or below during the probe spot test! Does the low capacitance requirement need to be 0.1pf; Whether there is a radio frequency requirement;
  9. What are the connected test instrument interfaces;
  10. Whether heating or cooling is required when testing the environment! Whether a closed cavity is required;
  11. What about Chuck's leakage requirements; Do you need to add a low-impedance chuck;
  12. Whether an anti-shock table is required;
  13. If you add a shockproof table, whether there is compressed air.


Magnetic field probe stations are widely used in the fields of the semiconductor industry, MEMS, superconductivity, electronics, ferroelectronics, physics, materials science and biomedicine.
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