Thermal Evaporation Vacuum Coating Machine
Composition
The system mainly consists of organic/ metal source evaporation sediment chamber, vacuum exhaust system, vacuum measurement system, evaporation source, sample heating control temperature, electronic control system, distribution system and so on.
Technical Index
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Model |
DXD-450 |
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Main Vacuum Chamber |
Square vacuum chamber, size: 400*400*400mm |
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Configuration of Vacuum System |
Mechanical pump, molecular pump, slide valve |
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Ultimate Pressure |
≤6*10-5Pa |
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Time of Recovery Vacuum |
Reach 9*10-4Pa in 40 mins ( expose in air for short time and inflate dry chlorine and then begin air exhaust) |
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Substrate Heat Plate |
Sample Size |
120*120mm, 1 piece |
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Mode of Motion |
Substrate could be up and down, mutation range: 0-50mm |
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Heat |
MAX. heat temperature of substrate 800℃±1℃ |
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Organic Resistance Evaporation Source |
Crucible |
Crucible capacity: ≥2cc |
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Temperature |
Room temperature—500℃， continuous and adjustable |
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Power |
Current: 300A, Max. output power: 3Kw |
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Water Cooling Electrode |
4 pieces, could be made into 2 evaporation boats |
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Quartz Crystal Film Thickness Controller |
Monitor thickness of film display range: 0-99μ9999Å |
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Air Circuit System |
Quality flow controller 1 channel |
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Laser beam scanning device |
Two-dimension scanning mechanical stage, carry out two freely scanning |
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Computer Control System |
It controls revolution target plate, rotation of target, rotation of sample, control temperature of sample, laser beam scanning and so on. |
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Floor Space |
Mainframe |
2450*1250mm2 ( independent rack, (770*600mm2) The size matches up glove case (1830*750mm2) |
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Electric Control Cabinet |
700*700mm2(1 set) |
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