Thin Film Solar Cell Continuous Preparation Equipment

Composition

The system mainly consists of copper, indium, gallium, selenium evaporation deposition chamber, molybdenum sputtering chamber, copper, indium, gallium, sputtering chamber, sample injection chamber, solemnization chamber, ZnO sputtering chamber, laser photoetching chamber, electrochemistry fabrication processing buffer chamber, sample injection chamber, sample delivery chamber, beam source furnace, magnetic control target, sample magnetic delivery institutions, sample bank device, sample heating institution, sample cart, pump system, vacuum measurement system, gas circuit system, electric control system and so on.

Technical Index

Ultimate pressure of Deposition chamber: 6.6*10-8Pa,
Ultimate pressure of sputtering chamber: 6.6*10-5Pa,
Sample injection chamber adopts manually open and close and could be placed 6 pieces samples,
Sample is glass, size: 100*100*3mm. Sputtering chamber could be placed one piece sample.
Sample could be heated and could manually delivery sample to each related stations in vacuum state.