Magnetron Sputtering Coating System

System composition

The DXMS-450C Magnetron Sputtering Coating System is composed of a coating chamber, magnetic control target, sample rack, working gas circuit, power supply and control system, and vacuum system.

Pear-shaped sputtering coating chamber, 1 set

• Size: Φ450㎜×460㎜;
• Electric large flange cover above the vacuum chamber, 1 piece;
• Two 4-inch magnetron sputtering target interfaces on the base plate, and the target head can be adjusted;
• CF150 flange interface is used to connect the vacuum system and vacuum measurement interface;
• Two pieces of observation windows and corresponding baffles.

Vacuum acquisition and measurement
The sputtering coating chamber adopts FF620 turbomolecular pump+-8L/s mechanical pump, with an ultimate vacuum better than 8×10-5Pa, measured using a domestic digital composite vacuum gauge, and the molecular pump port valve is a GV150 manual gate valve.

Sample Holder Assembly:

• Dimensions of substrate table Φ150mm, one 2-6-inch substrate or several small substrates can be placed at a time;
• The maximum heating temperature of the substrate platform is ≥500 ℃;
• The substrate can rotate autonomously, and the speed is controllable and adjustable within the range of 2-10 revolutions per minute;
• 1 set of sample baffle;
• The heater is made of oxidizable material;
• Select a temperature control table of a Japanese brand;
• A negative bias voltage of 0-200 volts will be applied.

Magnetron Sputtering Target

• Two pieces of Φ4 inch magnetron targets, which are installed on the bottom plate of the vacuum chamber, with adjustable target angle, compatible with RF and DC, water-cooled, and capable of single or double target sputtering coating;
• Uniformity within the 5-inch effective coating area ≤±5%;
• Uniformity within the 2-inch effective coating area ≤±3%.

Inflation gas path: 
There are three intake gas paths for mass flow meters (made in China) in the coating room, achieving control of working gas intake for argon and oxygen. Additionally, there is one nitrogen gas path. Three channels of gas enter the coating chamber through one CF16 ultra-high vacuum shut-off valve.

Coating power supply:

• One Set of RF Power Supply, with a power of 500W, capable of automatic matching (made in China);
• One DC power supply, with a power of 1000W (made in China).

Frame (rack), 1 set

System Control:

• Power supply: 380V/50Hz three-phase five wire power supply system with leakage protection. Grounding wires for equipment and electrical control cabinets.
• Two international standard power cabinets are equipped, which are installed with: 1 set of main control power supply, 1 set of digital composite vacuum gauge, 1 set of sample rack heating temperature control power supply, 1 set of sample rack drive power supply, 1 set of vacuum chamber lighting power supply, 1 set of molecular pump power supply, 1set of RF power supply for coating, and 1 set of DC power supply for coating.

Configuration List

Spare (Consumables) Part List

End users only need to:
1. Prepare water, electricity, and compressed air for the laboratory according to the requirements of the system.
2. Prepare the substrate, target material, and working gas (such as high-purity argon) required for the coating process.

Installation site requirements

• Venue: Equipment footprint: 2 meters (length) × 1.5 meters (width), for ease of operation, the required space for the entire system is not less than 3.5 meters (length) × 3.5 meters (width) × 2.4 meters high. The entrance door of the laboratory shall not be less than 1.85 meters high × 0.95 meters (width). For the convenience of equipment handling, it is best to locate the laboratory on the first floor.
• Environment: The ambient temperature is 10 ℃~30 ℃, and the humidity is not more than 70%. The surrounding environment of the equipment should be clean, with clean air, and there should be no dust or gas that can cause corrosion on electrical and other metal surfaces or cause conductivity between metals. The ground is made of terrazzo or wood paint, with no dust. Equipped with exhaust pipes for exhaust of mechanical pump exhaust gas.
• Power supply: 5KW 380V three-phase five wire, with a grounding wire.
• Cooling water: The inlet temperature shall not exceed 20℃, the inlet pressure shall be 0.2-0.3 MPa, and the cooling water flow rate shall not be less than 0.8 m³/h.

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