Electron Beam Coating System
Main Technical Parameters
1． The vacuum chamber is made of SUS304 stainless steel, with a size of Φ 500mm × 600 (H) mm, front door open, with observation window on the door to observe the electronic gun and workpiece.
2． There is one set of e-type 10Kw electronic gun and pneumatic baffle at the bottom of the vacuum chamber.
3． Vacuum system: Adopting molecular pump+mechanical pump vacuum unit, adopting high precision pneumatic cover valve, vacuum control has interlocking protection function, at least including: high valve and pre extraction interlock, high valve and inflation interlock, pre extraction and pre stage interlock, pre extraction and inflation interlock, etc. It has the functions of water, gas, and phase failure alarms.
4． Equipped with two sets of thermal evaporation source, working in rotation
The system is configured according to the turbo molecular pump system:
- One Set of FF-200/1200 turbomolecular pump
- One Set of GV200 pneumatic flap valve
- One Set of 8L/s mechanical pump
- Two Sets of Dg40 solenoid valves
- Ultimate Vacuum: 5×10-7 Torr
- Recovery time: pumped from atmosphere to 5×10-6 Torr ≤40min
5． Digital Display Composite Vacuum Gauge, made in China
6． Central control system: Siemens PLC and touch screen are used for centralized control, integrating vacuum control, baking control, rotation control, evaporation, internal baking, lighting, and fault alarm into one panel.
Fixture mechanism: There is a rotating frame mechanism above the vacuum chamber, which can hold a 4-inch or 6-inch substrate and rotate automatically, and the uniformity within effective coating area ≤±3%.
7． The speed of the fixture is 0-10rpm, with 1 quartz crystal film thickness gauge interface and 1 Chinese made film thickness gauge configured.
8． Baking: There is baking heating above the workpiece rack, controlled by a digital temperature controller, with a maximum temperature of 350 ℃.
9． Regarding the electronic gun section:
Main Technical Parameters:
- A 10Kw electronic gun
- Electron beam deflection angle 270 º
- The crucible of the electron gun is a six hole water-cooled copper crucible that can be electrically transposed.
- Automatic reset of high-voltage arc extinguishing for gun power supply.
- Cooling water: flow rate ≥ 10L/min, water pressure ≥ 0.15Mpa, inlet water temperature ≤ 25 ℃.
10． Quartz crystal film thickness gauge: Adopting a film thickness controller made in China, it can automatically control the evaporation rate of the electron gun and the action of the baffle after setting the coating parameters.
11． Configure one high-pressure cleaning rod for plasma glow discharge cleaning.
12． MFC mass flow meter: 1 set (1 circuit) Chinese product.
13． Rack: 1 unit, with a stainless steel cover and 3 plastic spray panels, the overall appearance of the rack is beautiful. Host size: 1300mm×1200mm×1600 mm.
14． One electric control cabinet with a specification of 700×700×1760 mm.
Configuration List
|
No |
Item Name |
Unit |
Qty |
Manufacturer |
|
1 |
Vacuum Chamber (size Φ 500 × H600mm), front door open, made of SUS304 stainless steel |
Set |
1 |
DEXINMAG |
|
2 |
Observation Window (installed on the door, Φ 100mm) |
EA |
2 |
DEXINMAG |
|
3 |
Observation Window Baffle (manual switch, equipped with reversible dark glass) |
Set |
2 |
DEXINMAG |
|
4 |
Lining Anti Fouling Plate (to prevent internal surface pollution, made of stainless steel) |
Set |
2 |
DEXINMAG |
|
5 |
Louver baffle (to prevent dust from entering the extraction pipeline) |
Set |
1 |
DEXINMAG |
|
6 |
Turbomolecular pump (FF-200/1200, water-cooled) |
Set |
1 |
Made in China |
|
7 |
Mechanical pump (8L/s) |
Set |
1 |
Made in China |
|
8 |
Vacuum main valve (made of stainless steel, GV200) |
Set |
1 |
DEXINMAG |
|
9 |
Pipeline (DN40 metal corrugated pipe) |
Set |
2 |
DEXINMAG |
|
10 |
Angle Valve (KF40) |
EA |
2 |
DEXINMAG |
|
11 |
Digital Composite Vacuum Gauge (ZDF-5227) |
Set |
1 |
Made in China |
|
12 |
Gas Mass Flow Controller (D07-7) |
Set |
1 |
Made in China |
|
13 |
Substrate Table, 6-inch film thickness uniformity: better than ± 3% |
Set |
1 |
DEXINMAG |
|
14 |
Thermal Evaporation Source (Switchable). |
Group |
2 |
DEXINMAG |
|
15 |
Electronic Gun Evaporation Source (SEBG-103C type, 10KW, equipped with a 4-hole crucible). |
Set |
1 |
Made in China |
|
16 |
Glow Cleaning Rod (with power supply, used for substrate glow cleaning) |
Set |
1 |
Made in China |
|
17 |
Equipment Installation Rack (profile steel bracket, surface spray plastic treatment) |
Set |
1 |
DEXINMAG |
|
18 |
Film Thickness Gauge (equipped with 2 pieces of probe) |
Set |
1 |
Made in China |
|
19 |
Main Control Power Supply |
Set |
1 |
DEXINMAG |
Spare (Consumables) Part List
|
No. |
Product Name |
Unit |
Qty |
Remark |
|
1 |
Crystals |
pcs |
10 |
Provided by DEXINMAG |
|
2 |
Electron Gun Filament |
pcs |
10 |
Provided by DEXINMAG |
|
3 |
Rubber Ring 19×3.55 |
pcs |
10 |
Provided by DEXINMAG |
|
4 |
Window Lead Glass D117×10 |
pcs |
2 |
Provided by DEXINMAG |
End users only need to:
1. Prepare water, electricity, and compressed air for the laboratory according to the requirements of the system.
2. Prepare the substrate, target material, and working gas (such as high-purity argon) required for the coating process.
Installation site requirements
1. The inlet temperature of the cooling water shall not exceed 20 ℃, the inlet pressure shall not be lower than 0.3MPa, and the cooling water flow rate shall not be lower than 2m3/h.
2. Instrument power supply requirements: 380V/3-phase five wire, 50Hz. Interphase imbalance ≤ 2%. Power supply power ≥ 30KW. Unidirectional 220V ± 10%. The zero wire cross-sectional area is required to be ≥ 10 square millimeters, and the ground wire cross-sectional area is required to be ≥ 10 square millimeters.
3. The compressed air supply volume shall not be less than 0.8m3/min, and the supply pressure shall not be less than 0.6MPa.
4. The number and specifications of gas storage cylinders are determined by the user based on experimental requirements.
5. Equipment footprint: 2m × 3m × 2.5m (H)
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