ECR Ion Source Hexapole Permanent Magnet

Design Principle

The design study of ECR ion source hexapole permanent magnet involves many aspects such as material, structure and size. Adopting Halbach structure six-pole permanent magnet can generate high strength and high stability radial magnetic field. By optimizing the magnet material and structure, the magnetic field generated at the inner wall of the plasma arc cavity of the ion source is maximized to meet the radial magnetic field strength requirements of the ECR ion source.

Permanent magnet materials: high-performance NdFeB permanent magnet materials, such as N45, N50M, etc., with high remanent magnetization and high coercive force, to ensure stable performance of the magnet in the working process.

Structural design: Halbach structural design is adopted, which makes the radial magnetic field generated by the magnet in the working area uniform and strong. At the same time, through the reasonable selection and arrangement of the number of sectors, the higher-order magnetic field components are reduced and the magnetic field quality is improved.

Dimensional optimization: According to the specific needs of the ion source, the inner and outer diameters, thickness and other dimensions of the magnet are optimized to ensure that the radial magnetic field generated at the center of the magnet R = 50mm is uniformly distributed and the intensity meets the requirements.

Product features

Stable performance: The use of high-performance permanent magnet materials and optimized structure design ensures stable and reliable performance of the magnet in the working process.

High magnetic field strength: Through optimized design and simulation calculations, the magnetic field strength generated in the inner wall of the plasma arc cavity of the ion source meets the requirements of ECR ion source.

Customized service: We have a professional team of magnetic field simulation and installation engineers, and can customize different ion source hexapole permanent magnet products according to customer needs.

Widely used: applicable to a variety of small and medium-sized multi-charge state ion beam current experimental platform and ion implantation machine and other systems, to provide key beam current quality assurance for the relevant test platform.

Magnetic field simulation and installation

Magnetic field simulation: We use advanced magnetic field simulation software, such as POISSON, PERMAG, TOSCA, etc., to accurately calculate and simulate the magnetic field of the six-pole permanent magnet. Through the simulation calculation, we can accurately predict the distribution and intensity of magnetic field generated by the magnet in the working process, which provides strong support for the optimized design of the magnet.

Installation process: We have a team of professional installation engineers who are responsible for the installation and commissioning of the magnets. During the installation process, we strictly follow the operating procedures to ensure the installation accuracy and stability of the magnets. At the same time, we will also provide customers with detailed operation and maintenance guidelines to ensure the long-term stable operation of the magnets.

ECR (Electron Cyclotron Resonance) Ion Sources are the most effective devices for generating a stable strong current of multi-charge state ion beam streams. Due to its unique characteristics, the ECR ion source is used in many small and medium-sized multi-charge state ion beam current experimental platforms and ion implanters to generate repeatable and stable multi-charge state ion beam currents for the latter. These stable ion sources provide critical beam quality assurance to improve the performance of the relevant test platforms.

Our company has a group of experienced magnetic field simulation and installation engineers, can be customized according to customer demand for a variety of different ion source hexapole permanent magnets, stable performance, can meet user expectations. We have cooperated with various units of the Institute of Physics and related research units of international famous universities on this project for many times.

Schematic of measurement at magnet center R=50 mm

Radial magnetic field distribution at magnet center R=50 mm