Wafer Level Magnetic Field Probe Station: Quality Inspection Report

Product Factory Inspection Report

Tester

Project Manager

Robin King

Thomas Lee

Test Date

2024.12.31

Number of products tested

   1

Test the temperature and humidity

23℃/45%

Test the software version

V1.0.0.1

Conclusion

Qualified

Equipment Status Confirmation: The machine test was completed on December 31, 2024.

     Equipment Name: Wafer Level Automatic in-plane Magnetic Field Probe Station

     Equipment Model: DX1PS3

     Serial Number: MPS1DDL01

NO

ITEM NAME

SPECIFICATION & MODEL

QTY

1

Probe station host

The internal integrated components are as follows:
1. 330mT in-plane electromagnetic field;
2. X-axis automatic/manual integrated displacement table with a stroke of 300mm;
3. Y-axis automatic/manual integrated displacement table with a stroke of 300mm;
4. Z-axis automatic/manual integrated displacement table with a stroke of 10mm;
5. 12-inch sample table chuck suction cup;
6. Microscope lifting and adjusting bracket.

1 UNIT

2

Magnet
Power Supply

DXMP-20/40, input voltage single-phase 220V -50/60Hz;
Output voltage ± 20A, output current ± 40V

1 UNIT

3

Probe Holder

X/Y/Z stroke is ± 6mm, adjustable resolution is ± 1 micron, vacuum adsorption

4 SET

4

Probe Fixture

Leakage accuracy of 10pA, maximum current of 1A, withstand voltage of 700V, maximum frequency of 1MHz, 1.5m triple coaxial cable, BNC standard interface, coaxial male connector

4 SET

5

DC Probe

Needle tip diameter of 0.5 microns, capable of measuring a maximum DC 1A

20 PC(S)

6

Control Computer

DELL brand, I5CPU， 16GB memory, 256GB solid-state drive+1T mechanical hard drive, 23.8-inch display, English version of Windows system, pre-installed probe station measurement software.

1 SET

7

Oil-free Vacuum Pump

VP0125, Input voltage single-phase 220V -50/60Hz, flow rate 7L/min

1 SET

8

Single Tube Microscope

Input voltage single-phase 220V -50/60Hz, high-definition imaging with continuous zoom and no need to change the working height, coaxial lighting, working distance>80mm, 3mm micro focus, larger magnification 0.75X~5X, camera frame rate 30 frames, USB 2.0 output, 5 million pixels, supports manual/automatic RGB adjustment white balance, 13-inch display.

1 SET

9

Air floating Platform

Table size 800mm*1200mm, including air pump, input voltage single-phase 220V -50/60Hz

1 SET

10

Recirculating Cooler（Chiller）

Input voltage single-phase 220V -50/60Hz, cooling capacity 1200W

1 SET

11

Cooling Fluid

25KG

12

Microscope Calibration Fixture

1 EA

13

Product Manual

1 PC(S)

Testing Items

Requirements

Method

Frequency

Conclusion

Determination

1.1 Appearance Examination

It has a clean and tidy appearance, and the color is integrated as a whole

visual inspection

100%

Qualified

Y

1.2 Inspection of Parts

The overall structure is stable and the connection of each component is smooth

Visual and Manual Operation Inspection

100%

Qualified

Y

1.3 Inspection of Electrical Systems

The electrical connections are safe enough

Visual and Manual Operation Inspection

100%

Qualified

Y

1.4 Inspection of Parts

The software operates smoothly without any lagging or stuttering

Visual and Manual Operation Inspection

100%

Qualified

Y

Testing Items

Requirements

Method

Frequency

Conclusion

Determination

2.1

The magnet temperature control stops the power supply automatically when the temperature exceeds 65°C and the software alarms

Visual and Manual Operation Inspection

100%

Qualified

Y

2.2

It has warning signs such as "Caution: Magnetic Field".

Visual and Manual Operation Inspection

100%

Qualified

Y

2.3

The water cooling machine has been running in circulation for more than 48 hours, and no water leakage has been observed.

Visual and Manual Operation Inspection

48h

Qualified

Y

Testing Items

Requirements

Method

Frequency

Conclusion

determination

3.1

The microscope is working properly.

Visual inspection

100%

Qualified

Y

Testing Items

Requirements

Method

Frequency

Conclusion

Determination

4.1

The magnetic field intensity is higher than 330 mT

test with gaussmeter

100%

Qualified

Y

4.2

The magnetic field homogeneity is better than 1% within a diameter of 1 mm

Software - Program Control and Gaussmeter Testing

100%

Qualified

Y

4.3

The magnetic field resolution is better than 0.02 mT

Software - Program Control and Gaussmeter Testing

100%

Qualified

Y

4.4

have the function of measuring magnetic hysteresis loop

Software - Program Control and Gaussmeter Testing

100%

Qualified

Y