Magnetic Field Probe Station

Model

DX1PS3

Magnetic field direction

In-plane

Magnetic field strength

In-plane magnetic field: 330mT@10mm air gap

Is the air gap adjustable

No

Sample size

12-inch wafer (downward compatible with fragmentation test)

Probe type and quantity

DC probes (set of 4) or microwave probes (set of 4)

Sample Stage Parameters

XY electric control travel ±150mm, adjustment accuracy 2 um; T-axis manual adjustment ±5°, minimum adjustment accuracy 5°

Microscope type

Monocular microscope

Product description

▹ In-plane/perpendicular magnetic field probe station, except for the magnet, the structural versatility design magnetic field uniformity is ±1%@d1mm;

▹ Real-time monitoring and feedback of magnetic field strength, the monitoring accuracy is better than 1%, and the magnetic field resolution is better than 0.02mT;

▹ Holds up to 12-inch wafers and is backward compatible with 8-inch and 6-inch chips;

▹ Compatible with up to 4 sets of probes (RF or DC test);

▹ Provide Z-axis probe platform rapid lifting function to achieve efficient testing.

Equipment can provide upgrade points

The manual lifting function of the Z-axis probe platform can be upgraded to electric control

DX1PS3 Wafer Level Automatic In-plane Magnetic Field Probe Station

1

One-Dimensional In-Plane Electromagnet

• Magnetic field direction: in-plane X
• Magnetic field size: ≥ 330mT@10mm air gap
• Uniform zone: ± 1% @ 1mm
• Magnetic field resolution: 0.02 mT

1 pcs

2

400W

Power Supply

• The output current of the power supply can continuously vary between positive and negative rated maximum currents
• Smooth zero crossing of current without breakpoints, non-switching commutation
• Four-quadrant operation of output current and voltage (suitable for inductive loads)
• The current change rate can be set within the range of 0.00001 to 0.5 F.S./s (F.S. is the rated maximum output current of 5A)
• AC input, single-phase 220V ± 10% (50Hz/60Hz)

1 pcs

3

Sample Carrier

• Electronic control X and Y axis travel ± 150mm, adjustable resolution of 2 microns;
• Manual T-axis precision adjustment stroke ± 5 °, adjusting sensitivity 5 ′;
• Carrier diameter 10 inches, vacuum adsorption;

1 pcs

4

Probe Holder, Probe Fixture, Probe

• Vacuum switch base;
• The travel distance in the XY direction is ± 6mm, ≥ 80 teeth/inch;
• Adjust resolution ± 1 μ M;
• 30 ° tilt adjustment mechanism.
• 5 DC probes
• Leakage accuracy ≥ 10pA;
• Maximum current 1A;
• Withstand voltage of 700V;
• The highest frequency is 1MHz;
• ≥ 1.5 meters of three coaxial cable;
• BNC standard interface, coaxial male connector.

4 pcs 

5

Control Computer

• CPU: Intel I5;
• Memory: 16GB;
• Hard disk: 256GB (solid-state)+512GB (mechanical);
• Graphics card: Integrated graphics card;
• Display: 23.8 inches

1 pcs

6

Oil-Free Vacuum Pump

• Oil-free vacuum pump, capable of running 24 hours;
• Provide vacuum adsorption for the adsorption probe holder, with an air flow rate of ≥ 7L/min.

1 pcs

7

Single Tube Microscope

• Continuous doubling of high-definition imaging, coaxial lighting, working distance ≥ 80mm; Camera frame rate of 30 frames, USB2.0 output, 5 million pixels, supports manual/automatic RGB;
• Larger magnification of 0.75X~5X, 3mm micro focus, continuous zoom without changing the working height;

1 pcs

8

Air Flotation Platform

• Table size ≥ 800mm x 1200mm;
• Air flotation shock absorption
• A set of compressors

1 pcs

9

Integration Of Probe Station Body Structure

• The sample is vacuum adsorbed onto the platform, and the trachea is not exposed;
• Equipped with a Z-axis manual device, with a resolution of 10 μ m. Compatible with electromagnetic structure, convenient for sample retrieval and placement, with no position drift under maximum magnetic field;
• Integrated Hall probe, Gauss meter, microscope adjustment bracket

1 pcs

10

Water Chiller

• Temperature range: 5-35 ℃;
• Refrigeration capacity: 1200 W @ 25 ℃
• Water tank capacity: 10 L
• Temperature control accuracy: ± 1℃

1 pcs